Title:
Sensing device for complex micro- and nanostructures
Location:Germany
Ref no:10 DE 1592 3G5W
Rating:
Abstract
A German research institute based has developed a micromechanic sensor for the fabrication quality control of complex micro- and nanoparts. The sensor enables the user to measure the size, form, position and roughness even on vertical surfaces of midget structures. The institute is searching for licensees.
Details
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